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EasyFASEDA

Fab Automation System

EasyFASDA E EasyFASGEM300-based product is a software package to respond to
300mm semiconductor specifications and EDA standards. Customers' equipment can be
upgraded to EDA and SEMI standard SECS Interface equipment more easily and easily and
at a lower price, and EDA Service can be used using the Configuration Tool
if they use the EasyFASGEM300 product.

Product
Features

Based on EasyFASGEM300

Based on EasyFASGEM300

Easy and simple coding

Easy and simple codingUpdate EasyEDA auto-connect and EDA related information

Product
funtion

  • E120, E125, E128, E132, E134, E138, E145, E164

  • Freeze2(0710) Support

Product specific
support
standards

SEMI
Standard Response

Standard Explanation EasyFAS EasyFASGEM EasyFASGEM300 EasyFASEDA
E4 SECS-I (Serial protocol) O O O O
E5 SECS-ll O O O O
E30 GEM O O O
E37 HSMS-SS (Ethernet protocol) O O O O
E40 PROCESSING MANAGEMENT (PJM) O O
E87 CARRIER MANAGEMENT (CMS) O O
E90 SUBSTRATE TRACKING (STS) O O
E94 CONTROL JOB MANAGENENT (CJM) O O
E120,E125,E128,E132,E134,E138,E145,E164 O

Function Block Diagram

Development Support Tool and Delivery Manual

    • - Configuration Tool
    • - Monitoring Tool
    • - Host Simulator(EasySim)
    • - Delivery Manual
    • - Sample Program
1 Configuration Tool

SECS-I & HSMS Communication Method Settings

Set communication parameters

Automatically manage various operational logs

Easy SECS message writing function using mouse drag & drop method

2 Monitoring Tool

It is possible to monitor various conditions and data of the equipment in operation.

3 Host Simulator
(EasySim)

Ability to send and receive messages

Automatic reply to response messages

4 Sample Program
5 Delivery Manual

User’s Manual

API Manual

Configuration Tool Operation Manual