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EasyFASGEM 300

Fab Automation System

EasyFAS is a software package for online support of 300mm semiconductor
equipment that allows customers to upgrade to SEMI standard SECS Interface
equipment more easily, easily, and at a lower prices.

Product
Features

SEMI Standard Response

SECS, HSMS, GEM Compliance Online Interface response

Reduce human resources by shortening SEMI Standard learning and communication specifications

Easy and simple coding

All models, including Fixed/Internal Buffer, Single/Multi Chamber

Simple programming interface enables application programming

Product
funtion

  • SECS-I / HSMS Communication

  • GEM funtion

  • Host에서 Process Job, Control Job 작성

  • Process Job, Control Job and Health Management

  • Carrier, Manage the status and location of the Substrate (Wafer)

  • Carrier, Slotmap Lookup Management

  • Manage the status of Loadport

  • Various equipment interfaces

Product specific
support
standards

SEMI
Standard Response

Standard Explanation EasyFAS EasyFASGEM EasyFASGEM300
E4 SECS-I (Serial protocol) O O O
E5 SECS-ll O O O
E30 GEM O O
E37 HSMS-SS (Ethernet protocol) O O O
E40 PROCESSING MANAGEMENT (PJM) O
E87 CARRIER MANAGEMENT (CMS) O
E90 SUBSTRATE TRACKING (STS) O
E94 CONTROL JOB MANAGENENT (CJM) O

Function Block
Diagram

Development Support Tool and Delivery Manual

    • - Configuration Tool
    • - Monitoring Tool
    • - Host Simulator(EasySim)
    • - Delivery Manual
    • - Sample Program
1 Configuration Tool

SECS-I & HSMS Communication Method Settings

Set communication parameters

Automatically manage various operational logs

Easy SECS message writing function using mouse drag & drop method

2 Monitoring Tool

It is possible to monitor various conditions
and data of the equipment in operation.

3 Host Simulator
(EasySim)

Ability to send and receive messages

Automatic reply to response messages

4 Sample Program
5 Delivery Manual

User’s Manual

API Manual

Configuration Tool Operation Manual