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Product
Features
SEMI Standard Response
SECS, HSMS, GEM Compliance Online Interface response
Reduce human resources by shortening SEMI Standard learning and communication specifications
Easy and simple coding
All models, including Fixed/Internal Buffer, Single/Multi Chamber
Simple programming interface enables application programming
Product
funtion
-
SECS-I / HSMS Communication
-
SECS-II Message Control
-
GEM Features Automatic creation of GEM Scenario / Automatic creation of SECS Message Format
Product specific
support
standards
SEMI
Standard Response
| Standard | Explanation | EasyFAS | EasyFASGEM | EasyFASGEM300 |
|---|---|---|---|---|
| E4 | SECS-I (Serial protocol) | O | O | O |
| E5 | SECS-ll | O | O | O |
| E30 | GEM | O | O | |
| E37 | HSMS-SS (Ethernet protocol) | O | O | O |
| E40 | PROCESSING MANAGEMENT (PJM) | O | ||
| E87 | CARRIER MANAGEMENT (CMS) | O | ||
| E90 | SUBSTRATE TRACKING (STS) | O | ||
| E94 | CONTROL JOB MANAGENENT (CJM) | O |
Function Block
Diagram
Development Support Tool and Delivery Manual
-
- - Configuration Tool
- - Monitoring Tool
- - Host Simulator(EasySim)
- - Delivery Manual
- - Sample Program
1 Configuration Tool
SECS-I & HSMS Communication Method Settings
Set communication parameters
Automatically manage various operational logs
Easy SECS message writing function using mouse drag & drop method
2 Monitoring Tool
It is possible to monitor various conditions and
data of the equipment in operation.
3
Host Simulator
(EasySim)
Ability to send and receive messages
Automatic reply to response messages
4 Sample Program
5 Delivery Manual
User’s Manual
API Manual
Configuration Tool Operation Manual