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MFI

Macro Flow Interface

Macro Flow Interface (MFI) is a solution designed to allow users to create Flow
Parts in the form of Windows Dynamic Link Library (DLL) among the various features of
Main Scheduler. Through the API, the user can easily develop an optimized Flow DLL
for the facility. The Main Scheduler provides non-Flow functions such as Event Message,
Recipe, Animation, IO, Process Recipe Data, Logging, etc.

Product
Features

Flow DLL associated with Main Exe

You can use function to use in Main Excel

Event Message, Recipe, Animation, IO, Process Recipe Data, Logging

A user is possible to develop and modify the air conditions

Provides an interface to connect to the Main Exe

Providing Application Programming Interface for Flow Development

Product
Features

  • Provision of APIs for Robot Multi Slot Behavior Development

  • Flexible Loadlock Scenarios Can Be Developed

  • Parallel Chamber Development Possible

EasyCluster MFI
Product
Development
Facility Type

  • Basic(200mm)
  • Basic(300mm)
  • Double
  • LL & TT
  • Pentagon
  • In-Line
  • Multi Double
  • Multi Core Ⅱ
  • Furnace
  • Batch
  • Track
  • Cluster-Batch

Function Block
Diagram

Development Support Tool and Delivery Manual

Delivery Manual

Macro Flow Interface Guide

Sch_INF_API( Scheduler Interface API ) Manual