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Product
Features
Easy Interface
Easy Interface
Creating a Simple SECS Message
With the provided API, you can freely write a dynamic message structure.
Provides a user interface
You can simply set and save
options using the configuration tool.
Product
funtion
-
SECS-I / HSMS Communication
-
Analyzing and Generating SECS-II Messages
-
Create SECS Communication Log
Product specific
support
standards
SEMI
Standard Response
| Standard | Explanation | Easy FAS | Easy FASGEM | Easy FASGEM300 |
|---|---|---|---|---|
| E4 | SECS-I (Serial protocol) | O | O | O |
| E5 | SECS-ll | O | O | O |
| E30 | GEM | O | O | |
| E37 | HSMS-SS (Ethernet protocol) | O | O | O |
| E40 | PROCESSING MANAGEMENT (PJM) | O | ||
| E87 | CARRIER MANAGEMENT (CMS) | O | ||
| E90 | SUBSTRATE TRACKING (STS) | O | ||
| E94 | CONTROL JOB MANAGENENT (CJM) | O |
Function Block
Diagram
Development Support Tool and Delivery Manual
-
- - Configuration Tool
- - Host Simulator(EasySim)
- - Delivery Manual
- - Sample Program
1 Configuration Tool
SECS-I & HSMS Communication Method Settings
Set communication parameters
Automatically manage various operational logs
Easy SECS message writing function using mouse drag & drop method
2 Host Simulator(EasySim)
Ability to send and receive messages
Automatic reply to response messages
3 Sample Program
4 Delivery Manual
API Manual
Configuration Tool Operation Manual