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EasyCluster

EasyRCS, EasyGEM, EasyCTC, EasyTMC, EasyPMCProcess device control, control solution

POINT
EasyGEM and EasyEES provide the solutions through SECS-II and HSMS on the Fab Automation of Semiconductor and FPD eqipment.
EasyCTC is for the integration and centralized control of the whole eqipment. EasyTMC and EasyPMC are the framework of TMC and PMC applications respectively.

What is the EasyCluster™?

Apply

Semiconductor/FPD(LCD, OLED…)/LED/Solar/Electronics(PCB, MLCC…)/Inspection/Stand-Alone/Etc...

Process

CVD, PVD, Etcher, Asher, RTP, Laser, Track, AOI, Inline…

Conveying device(Cluster/Inline/Stand-Alone/Multi-Cluster...)

  • Support up to 128 process modules
  • Support vacuum/ATM transport module (Multiple up to 6)
  • Support Single/Dual/Triple arm robot
  • Support 4 carrier modules (Extend up to 12 modules)
  • Support single/dual aligner
  • Support multi slot cooler
  • Configurable Equipment Define
  • Various Control methods

Advan
tages

  • All controllers(CTC, TMC, PMC) are networked using Ethernet.
  • Any operation system(~Windows7) supporting I/O modules can be used
  • Analog I/O, Digital I/O, Serial I/O, DeviceNet, VME, PLC, etc…
  • Using Windows NT series and Visual C/C++(~2008) - No more Need Third's Party or Licensed Software
  • Server/Client architecture over TCP/IP or within controller
  • Flexible software/hardware structure according to the complexity of the equipment
  • SEMATECH(Semiconductor Manufacturing Technology) compliant Graphic User Interface
  • Support various management function
  • How to manage various equipment

    I/O Management - Remote and direct I/O control, Interlock Service

    Alarm Management: Alarm recovery, Alarm history

    Function Management: Control Equipment, User’s written code, etc

    Recipe Management: Lot, Cluster, Process recipe

    Data logging system: Lot, History, Operate, Online, Error, System, Plotting

    GUI Management: Various Navigations, Configurable Data Define

    User Management: Level, Priority, Access Control

    System Parameter: Configuration, Sub-system, etc

    Scheduling System: Flow Engine, Dynamic Scheduling

    Maintenance: Vacuum, Gas Delivery, Transfer, etc (User’s Part)

EasyCluster™

This software is designed to control the module controller part and cluster tool controller part of semiconductor equipment, and provides various features required for equipment control.

It supports open-system architecture for the parts, and is coded on the Windows™(NT, 2000, XP, 7) for soft real-time application. This software also makes various utilizations of equipment possible by supporting and applying multi-tasking, multi-threading, multi-programming and stable operation for the equipment, and is designed to minimize the time lag between development and application.

IO defining and application is easy for end users, and through setup of configuration this software is intended ready to be modified and easy to make similar system afterwards, and is designed to be capable of being applied to cluster tool controller. This software also supports platform as a EasyCluster™ Client/Server that can serve the role of cluster tool as a cluster tool controller that can be linked to module controller.

No Contents(maxiumum Usable Count) Compact Normal Wide Huge Huge2 Huge3
file Execution File Name Cims97_s Cims97 Cims97_2 Cims97_h Cims97_h2 Cims97_h3
1 IO Driver 50 100 200 500 1000 900
2 Lookup Table 50 100 200 500 1000 900
2 Lookup Table 100 500 1000 2500 2500 2500
3 Enumeration Table 500 2500 5000 9999 9999 9999
4 Digital IO 500 2500 5000 9999 20000 40000
5 Analog IO 500 2500 5000 9999 20000 40000
6 String IO 250 1500 3000 5000 10000 10000
7 Function Table 250 500 1000 2000 2500 2500
8 Setpoint Interlock for Digital IO 32 64 128 256 256 256
9 Setpoint Interlock for Analog IO 16 32 64 128 128 128
10 Value Interlock 250 500 1000 2000 2000 2000
11 Alarm Object 750 1500 3000 5000 9999 9999
12 Navigation Screen Count 256 1024 2048 2048 4096 4096
13 Navigation History Buffer 64 128 512 1024 2048 2048
14 Argument String Size 128 128 256 256 256 256
15 Parameter String Size 256 256 256 512 512 512
16 Unique Monitor size Per Driver 100 256 300 512 512 512
17 Single Monitor size Per Driver 100 512 600 1024 1024 1024
108 Number of Monitoring IO for one Function 2560 5120 20480 20480 20480 20480

[Engine Restriction]

Advantages/Requirement

Advantages Minimum specification
Easy to build a control system hardware This software does not need any proprietary hardware.
The PC and I/O devises can be obtained anywhere.
Easy to develop application The well-prepared framework and its intuitive tool allow engineers
to develop to implement their own application and make it in the shortest
from Stand-Alone to Multi-Cluster type and In-Line systems to FPD equipment.
Easy to maintain An application can be easily modified without rebooting while system still alive.
Easy to distribute/combine hardware The powerful IMC function enable you to distribute a single application
to multiple over the network and vice versa immediately according to the
complexity of the equipment.
Easy to reuse Once an application was completed, it takes much shorter time to develop next
by reusing the most of the codes.
Easy to operate The graphic user interface and simulated keyboard makes it easy to operate in the field.
Easy to own The control solution can be provided in a variety forms, from turnkeydevelopment to infinity license.
Easy to get skilled engineer The use of most popular hardware and software environment makes it easy
to their skilled engineer.

Requirements

- Software
operating system: Windows NT 4.0 Workstation, Windows 2000, Windows XP, Windows 7 (Included 64 bits)
Supported Language: English, Japanese, Chinese, Korean ... (According to OS)
Development Tool: MS Visual Studio Series (~2010)
I/O Module: DeviceNet, Serial, PLC, Direct I/O...

- Hardware

Minimum Specification Recommended specification
CPU 500MHz or higher 1GHz or higher
Memory 64MB or higher 1GB or higher
HDD 1GB or higher 100GB or higher